MEMS and Microstructures in Aerospace Applications

Taylor & Francis Inc, 2005

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Offers an overview of MEMS development and provides demonstrations of examples of MEMS in space. This work explores factors common to the various described systems, such as MEMS packaging, handling and contamination control, material selection for specific applications, reliability practices for design and application, and assurance practices.

ISBN-13
9780824726379
ISBN-10
0824726375
Publisher
Taylor & Francis Inc
Year
2005
Publication date
2005-10-06
Pages
400
Dimensions
242x162x27
Weight
684