Tribology In Chemical-Mechanical Planarization
David Craven, Hong Liang
Taylor & Francis Inc, 2005
392,75 €On orderDelivery: 2-3 weeks
The role that friction and contact play in the processes of wear and planarization on material surfaces is central to the understanding of Chemical-Mechanical planarization technology. This book offers an examination of tribological principles and their applications in CMP, including integrated circuits and basic concepts in surfaces of contacts.
- ISBN-13
- 9780824725679
- ISBN-10
- 0824725670
- Publisher
- Taylor & Francis Inc
- Year
- 2005
- Publication date
- 2005-03-01
- Pages
- 200
- Dimensions
- 234x156x
- Weight
- 468