Microengineering, MEMS, and Interfacing
Danny Banks
Taylor & Francis Inc, 2006
392,75 €On orderDelivery: 2-3 weeks
Presents a general overview of micromachining techniques. This guide outlines techniques for micromachining materials, including silicon, metals, and polymers. It illustrates how to combine these technologies to create a variety of structures and devices. It includes discussion on nanotechnology and how it overlaps with microengineering.
- ISBN-13
- 9780824723057
- ISBN-10
- 0824723058
- Publisher
- Taylor & Francis Inc
- Year
- 2006
- Publication date
- 2006-03-23
- Pages
- 352
- Dimensions
- 229x152x
- Weight
- 595