Handbook of Silicon Semiconductor Metrology
Taylor & Francis Inc, 2001
558,50 €On orderDelivery: 2-3 weeks
Containing more than 300 equations and nearly 500 drawings, photographs, and micrographs, this reference surveys key areas such as optical measurements and in-line calibration methods. It describes cleanroom-based measurement technology used during the manufacture of silicon integrated circuits and covers model-based, overlay, and dopant dose.
- ISBN-13
- 9780824705060
- ISBN-10
- 0824705068
- Publisher
- Taylor & Francis Inc
- Year
- 2001
- Publication date
- 2001-06-29
- Pages
- 894
- Dimensions
- 257x185x49
- Weight
- 1654