Contamination-Free Manufacturing for Semiconductors and Other Precision Products
Robert P. Donovan
Taylor & Francis Inc, 2001
317,25 €On orderDelivery: 2-3 weeks
This study recognizes the need for improved control measures in the manufacturing process of highly sensitized semiconductor technology. It provides in-depth and advanced treatment on the origins, procedures and disposal of a variety of contaminants and ensures the proper methods necessary to meet the standards established in the 1997 National Technology Roadmap for Semiconductors (NTRS).
- ISBN-13
- 9780824703806
- ISBN-10
- 0824703804
- Publisher
- Taylor & Francis Inc
- Year
- 2001
- Publication date
- 2001-03-14
- Pages
- 460
- Dimensions
- 229x152x
- Weight
- 676