Handbook of Thin Film Deposition Techniques Principles, Methods, Equipment and Applications, Second Editon
Krishna Seshan
William Andrew Publishing, 2002
784,50 €On orderDelivery: 2-3 weeks
Suitable for engineers, technicians, and plant personnel in the semiconductor and related industries, this book traces the technology behind the spectacular growth in the silicon semiconductor industry and the continued trend in miniaturization.
- ISBN-13
- 9780815514428
- ISBN-10
- 0815514425
- Publisher
- William Andrew Publishing
- Year
- 2002
- Publication date
- 2002-02-01
- Pages
- 658
- Dimensions
- 162x237x44
- Weight
- 1192