Silicon Micromachining
H. V. (University of Twente, Enschede, The Netherlands) Jansen, M. (University of Twente, Enschede, The Netherlands) Elwenspoek
Cambridge University Press, 2004
110,50 €On orderDelivery: 2-3 weeks
This comprehensive book provides an overview of the key techniques used in the fabrication of micron-scale structures in silicon. It is a blend of detailed experimental and theoretical material, and will be of great interest to graduate students and researchers in electrical engineering and materials science whose work involves the study of micro-electromechanical systems (MEMS).
- ISBN-13
- 9780521607674
- ISBN-10
- 0521607671
- Publisher
- Cambridge University Press
- Year
- 2004
- Publication date
- 2004-08-19
- Pages
- 420
- Dimensions
- 188x247x27
- Weight
- 808