Ion-Solid Interactions
James (Arizona State University) Mayer, James K. Hirvonen, Michael (Los Alamos National Laboratory) Nastasi
Cambridge University Press, 1996
318,75 €On orderDelivery: 2-3 weeks
This book describes how materials, from semiconductors to tool steels, can be modified to create new materials. Its importance is that it is the first book in two decades to describe completely the implantation process which is used universally in semiconductor production.
- ISBN-13
- 9780521373760
- ISBN-10
- 052137376X
- Publisher
- Cambridge University Press
- Year
- 1996
- Publication date
- 1996-03-29
- Pages
- 572
- Dimensions
- 229x152x37
- Weight
- 1010