Delta-doping of Semiconductors
Cambridge University Press, 2005
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This book is the first to give a comprehensive review of the theory, fabrication, characterisation, and device applications of abrupt, shallow, and narrow doping profiles in semiconductors. Such doping profiles are a key element in the development of modern semiconductor technology.
- ISBN-13
- 9780521017961
- ISBN-10
- 0521017963
- Publisher
- Cambridge University Press
- Year
- 2005
- Publication date
- 2005-08-22
- Pages
- 620
- Dimensions
- 188x247x35
- Weight
- 1178