VLSI Fabrication Principles

Sorab K. (Rensselaer Polytechnic Institute, Troy, NY) Ghandhi

John Wiley & Sons Inc, 1994

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Integrating discussion of elemental (silicon) and compound (gallium arsenide) technologies, this monograph explains why the two materials are particularly suited to Very Large Scale Integrated (VLSI) schemes. The fabrication principles for circuits such as CMOS, MOS and PET are emphasized.

ISBN-13
9780471580058
ISBN-10
0471580058
Publisher
John Wiley & Sons Inc
Year
1994
Publication date
1994-04-22
Pages
864
Dimensions
240x164x44
Weight
1308