Physical Vapor Deposition of Thin Films
John E. (Colorado State University) Mahan
John Wiley & Sons Inc, 2000
242,25 €On orderDelivery: 2-3 weeks
This volume examines physical vapour deposition, one of the main methods for preparing thin films for integrated circuit manufacturing and many other high-tech industries. It introduces unified treatment of the field of physical vapour deposition, drawing on a wide range of physical science.
- ISBN-13
- 9780471330011
- ISBN-10
- 0471330019
- Publisher
- John Wiley & Sons Inc
- Year
- 2000
- Publication date
- 2000-02-08
- Pages
- 336
- Dimensions
- 238x164x22
- Weight
- 590