Spectroscopic Ellipsometry and Reflectometry
Harland G. (Motorola, Inc.) Tompkins, William A. (Nanometrics, Inc.) McGahan
John Wiley & Sons Inc, 1999
221,25 €On orderDelivery: 2-3 weeks
While single wave ellipsometry has been around for years, spectroscopic ellipsometry is fast becoming the method of choice for measuring the thickness and optical properties of thin films. This book provides the first practical introduction to spectroscopic ellipsometry and the related techniques of reflectometry.
- ISBN-13
- 9780471181729
- ISBN-10
- 0471181722
- Publisher
- John Wiley & Sons Inc
- Year
- 1999
- Publication date
- 1999-04-06
- Pages
- 248
- Dimensions
- 163x237x19
- Weight
- 516