Digital Holography for MEMS and Microsystem Metrology
Anand (Nanyang Technological University, Singapore) Asundi
John Wiley & Sons Inc, 2011
150,50 €On orderDelivery: 2-3 weeks
By taking a practical approach to the industrial inspection of digital holography, Digital Holography for MEMS and Microsystem Metrology offers a description of the use of digital holography and its growing applications for MEMS characterization, residual stress measurement, design and evaluation and device testing and inspection.
- ISBN-13
- 9780470978696
- ISBN-10
- 0470978694
- Publisher
- John Wiley & Sons Inc
- Year
- 2011
- Publication date
- 2011-07-28
- Pages
- 228
- Dimensions
- 237x164x19
- Weight
- 486