Fundamental Principles of Optical Lithography
Chris (Lithoguru.com) Mack
John Wiley & Sons Inc, 2007
96,25 €On orderDelivery: 2-3 weeks
Fundamental Principles of Optical Lithography: The Science of Microfabrication presents a complete theoretical and practical treatment of the topic of lithography for both students and researchers. This sole-authored text includes optional computer simulation exercises as well as problems at the end of each chapter.
- ISBN-13
- 9780470727300
- ISBN-10
- 0470727306
- Publisher
- John Wiley & Sons Inc
- Year
- 2007
- Publication date
- 2007-11-16
- Pages
- 544
- Dimensions
- 174x247x29
- Weight
- 916