Spectroscopic Ellipsometry
Hiroyuki (National Institute of Advanced Industrial Science & Technology, Tsukuba, Japan) Fujiwara
John Wiley & Sons Inc, 2007
242,25 €On orderDelivery: 2-3 weeks
Ellipsometry is a powerful tool used for the characterization of thin films and multi-layer semiconductor structures. This book deals with fundamental principles and applications of spectroscopic ellipsometry (SE).
- ISBN-13
- 9780470016084
- ISBN-10
- 0470016086
- Publisher
- John Wiley & Sons Inc
- Year
- 2007
- Publication date
- 2007-01-26
- Pages
- 392
- Dimensions
- 235x157x26
- Weight
- 762