Multi-Wafer Rotating MEMS Machines
Springer-Verlag New York Inc., 2009
172,25 €On orderDelivery: 2-3 weeks
Describes the collaboration and research that was developed to produce the MIT Gas Turbine Engine. Both the engine and generator are fabricated from silicon using a combination of bulk and surface microfabrication technologies. This book discusses the technical details that have gone into producing the engine and the overall systems-level.
- ISBN-13
- 9780387777467
- ISBN-10
- 0387777466
- Publisher
- Springer-Verlag New York Inc.
- Year
- 2009
- Publication date
- 2009-09-30
- Pages
- 456
- Dimensions
- 235x155x