Physics of Radiofrequency Capacitive Discharge
V. P. Savinov
Taylor & Francis Ltd, 2020
87,25 €On orderDelivery: 2-3 weeks
This book describes the physical mechanism of high-frequency (radio-frequency) capacitive discharge (RFCD) of low and medium pressure and the properties of discharge plasma in detail. The work is intended for scientists engaged in gas discharge physics and low-temperature plasmas, and relevant specialties.
- ISBN-13
- 9780367571627
- ISBN-10
- 0367571625
- Publisher
- Taylor & Francis Ltd
- Year
- 2020
- Publication date
- 2020-06-30
- Pages
- 322
- Dimensions
- 234x156x
- Weight
- 453