Microelectromechanical Systems
Commission on Engineering and Technical Systems, Committee on Advanced Materials and Fabrication Methods for Microelectromechanical Systems, Division on Engineering and Physical Sciences, National Materials Advisory Board, National Research Council
National Academies Press, 1997
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Microelectromenchanical systems (MEMS) is a field that adapts for new uses a technology already optimized to accomplish a specific set of objectives. MEMS is a multidisciplinary field involving challenges and opportunities for electrical, mechanical, chemical, and biomedical engineering as well as physics, biology, and chemistry.
- ISBN-13
- 9780309059800
- ISBN-10
- 0309059801
- Publisher
- National Academies Press
- Year
- 1997
- Publication date
- 1997-12-01
- Pages
- 76
- Dimensions
- 279x216x25
- Weight
- 301