Beam Technologies for Integrated Processing
Commission on Engineering and Technical Systems, Committee on Beam Technologies: Opportunities in Attaining Fully Integrated Processing Systems, Division on Engineering and Physical Sciences, National Materials Advisory Board, National Research Council
National Academies Press, 1992
136,25 €On orderDelivery: 2-3 weeks
Beam technologies play an important role in microelectronic component fabrication. This volume identifies various beam technologies and their applications in electronics and other manufacturing processes. Recommendations for research and development to enhance the understanding, capabilities, and applications of beam technologies are presented.
- ISBN-13
- 9780309046350
- ISBN-10
- 0309046351
- Publisher
- National Academies Press
- Year
- 1992
- Publication date
- 1992-01-01
- Pages
- 106
- Dimensions
- 279x216x25
- Weight
- 310