Nanotechnology
Oxford University Press, 1996
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The manufacture of integrated circuits and opto-electronic devices, for example, calls for accuracies in the nanometre range (approximately three atomic lattice spacings). This book examines the technology and systems needed to achieve this level of accuracy. It is written by the leading researchers in Japan, that is: the world leaders.
- ISBN-13
- 9780198562832
- ISBN-10
- 0198562837
- Publisher
- Oxford University Press
- Year
- 1996
- Publication date
- 1996-07-25
- Pages
- 422
- Dimensions
- 253x194x27
- Weight
- 1005